finfet metal gate
由RBao著作·2015·被引用6次—Inthispaper,wedevelopamultiplicativemodeltosimulatethetungsten(W)filmresistivityandgateresistanceforreplacementmetalgate(RMG)withW ...,由WTu著作·2022—Themetalgate(MG)heightcomposedofcomplicatedworkfunctionmetal(WFM)films...
Properties of bulk FinFET with high
- metal gate material
- finfet metal gate
- High-k metal gate
- metal製程
- metal gate h1z1
- high k metal gate製程
- metal製程
- 短通道效應缺點
- High-k metal gate
- finfet metal gate
- metal gate material
- high k metal gate原理
- 介電層用途
- high k metal gate process flow
- metal gate process
- high k metal gate製程
- metal gate poly gate
- metal gate好處
- metal gate process flow
- High-k metal gate
- metal gate
- High-k/metal gate
- high k metal gate原理
- hk metal gate
- metal gate製程
Inthispaper,bulkFinFETwithhigh-κ/metalgatestack,suchasHfO2/TiN,andbulkFinFETwithSiO2/poly-Sigatestackwereanalyzedandcomparedby3D ...
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